Electromagnectic wave detecting element

ABSTRACT

The present invention is to provide an electromagnetic wave detecting element that can prevent a decrease in light utilization efficiency at sensor portions. The sensor portions are provided so as to correspond to respective intersection portions of scan lines and signal lines, and have semiconductor layer that generate charges due to electromagnetic waves being irradiated, and at whose electromagnetic wave irradiation surface sides upper electrodes are formed, and at whose electromagnetic wave non-irradiation surface sides lower electrodes are formed. Bias voltage is supplied to the respective upper electrodes via respective contact holes by a common electrode line that is formed further toward an electromagnetic wave downstream side than the semiconductor layer.

CROSS-REFERENCE TO RELATED APPLICATION

This application claims priority under 35 USC 119 from Japanese PatentApplication No. 2008-017743, No. 2008-093858 and No. 2008-209179, thedisclosure of which is incorporated by reference herein.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to an electromagnetic wave detectingelement. In particular, the present invention relates to anelectromagnetic wave detecting element that includes a TFT active matrixsubstrate that detects an image and at which sensor portions areprovided in correspondence with intersection portions of plural scanlines and plural signal lines that are disposed so as to intersect oneanother.

2. Description of the Related Art

Radiation image detection devices such as FPDs (flat panel detectors),in which an X-ray sensitive layer is disposed on a TFT (thin filmtransistor) active matrix substrate and that converts X-ray informationdirectly into digital data, and the like have been put into practice inrecent years. As compared with a conventional imaging plate, an FPD hasthe advantages that an image can be confirmed immediately and videoimages as well can be confirmed, and the popularization of FPDs hasadvanced rapidly.

Various types of such a radiation image detection device have beenproposed. For example, there is a direct-conversion-type radiation imagedetection device that converts radiation directly into charges andaccumulates the charges. Moreover, there is an indirect-conversion-typeradiation image detection device that once converts radiation into lightat a scintillator of CsI:Tl, GOS (Gd2O2S:Tb), or the like, and, atsemiconductor layer, converts the converted light into charges andaccumulates the charges (see, for example, Japanese Patent ApplicationLaid-Open (JP-A) No. 2000-137080).

As an example, a plan view showing the structure of one pixel unit of anelectromagnetic wave detecting element 10′ that is used in anindirect-conversion-type radiation image detection device, is shown inFIG. 13. Further, a cross-sectional view along line A-A of FIG. 13 isshown in FIG. 14.

As shown in FIG. 13, sensor portions are provided at the electromagneticwave detecting element 10′, in correspondence with the respectiveintersection portions of plural scan lines 101′ and plural signal lines3′ that are disposed so as to intersect one another.

As shown in FIG. 14, the sensor portion includes: a semiconductor layer6′ at which charges are generated due to light being illuminated; anupper electrode 7′ that is formed by a light-transmissive,electrically-conductive member at an illumination surface side of thesemiconductor layer 6′ at which light is illuminated, and that appliesbias voltage to the semiconductor layer 6′; and a lower electrode 14′that is formed at the light non-illumination surface side of thesemiconductor layer 6′, and collects charges that are generated at thesemiconductor layer 6′.

At the electromagnetic wave detecting element 10′, common electrodelines 25′, that supply bias voltage to the upper electrodes 7′, aredisposed at the upper layer of the semiconductor layer 6′. Theresistance of the common electrode lines 25′ must be made to be low inorder to supply charges. Therefore, the common electrode lines 25′ areformed by using a low-resistance wiring material of Al or Cu, or ofmainly Al or Cu.

U.S. Pat. No. 5,777,355 discloses a technique of connecting respectiveupper electrodes that are formed from transparent,electrically-conductive members, so as to have them function also ascommon electrode lines.

However, as shown in FIG. 14, if the common electrode lines 25′ aredisposed at the illumination surface sides of the semiconductor layer6′, light is not illuminated onto the portions of the semiconductorlayer 6′ beneath the common electrode lines 25′, and the efficiency ofutilizing light decreases.

Thus, an electromagnetic wave detecting element that, by using thetechnique disclosed in U.S. Pat. No. 5,777,355, connects the respectiveupper electrodes 7′ that are formed from transparent,electrically-conductive members and causes them to function also ascommon electrode lines, is considered.

However, usually, the resistivity of a transparent,electrically-conductive member is very large, and is 50 to 200 timesthat of a low-resistance wiring material. Accordingly, if the upperelectrodes 7′ are respectively connected and made to function also ascommon electrode lines, the wiring load (resistance, capacity) of thecommon electrode lines increases, and the desired response cannot berealized. Therefore, the upper electrodes 7′ cannot be respectivelyconnected and made to function also as common electrode lines.

Note that, in the above description, the efficiency of utilization oflight is mentioned because light is the object of detection of thesemiconductor layer 6′. However, such problems arise as well in cases inwhich the object of detection is any type of electromagnetic waves suchas ultraviolet rays or infrared rays.

SUMMARY OF THE INVENTION

The present invention provides an electromagnetic wave detecting elementthat, although equipped with a common electrode line, can prevent adecrease in the efficiency of utilizing electromagnetic waves at sensorportions.

A first aspect of the present invention is an electromagnetic wavedetecting element that includes: a plurality of sensor portions having:semiconductor layer provided in correspondence with respectiveintersection portions of a plurality of scan lines and a plurality ofsignal lines that are disposed so as to intersect one another, thesemiconductor layer generating charges by being irradiated byelectromagnetic waves expressing an image that is an object ofdetection, first electrodes formed by electrically-conductive members,that have transmittance with respect to the electromagnetic waves, atirradiation surface sides of the semiconductor layer to which theelectromagnetic waves are irradiated, the first electrodes applying biasvoltage to the semiconductor layer, and second electrodes formed atnon-irradiation surface sides of the semiconductor layer with respect tothe electromagnetic waves, the second electrodes collecting the chargesthat are generated at the semiconductor layer; and a common electrodeline formed at an electromagnetic wave downstream side of the sensorportions, and connected to the first electrodes via respective contactholes, and supplying the bias voltage.

In accordance with the above-described aspect, the electromagnetic wavedetecting element of the present invention is sensor portions thatgenerate charges due to electromagnetic waves being irradiated. Thesensor portions, that have the semiconductor layer at whoseelectromagnetic wave irradiation surface sides the first electrodes areformed and at whose electromagnetic wave non-irradiation surface sidesthe second electrodes are formed, are provided in correspondence withthe respective intersection portions of the scan lines and the signallines.

In accordance with the above-described aspect, bias voltage is suppliedto the first electrodes via respective contact holes by the commonelectrode line that is formed further toward the electromagnetic wavedownstream side than the sensor portions.

In this way, in the electromagnetic wave detecting element of thepresent invention of the above-described aspect, the common electrodeline that supplies bias voltage to the first electrodes is formedfurther toward the downstream side of the electromagnetic waves than thesensor portions. Accordingly, shielding of the electromagnetic waves,that are irradiated onto the semiconductor layer, by the commonelectrode line is eliminated. Therefore, even though the electromagneticwave detecting element of the present invention of the above-describedaspect is provided with a common electrode line, it can prevent adecrease in the efficiency of utilizing electromagnetic waves at thesensor portions.

In a second aspect of the present invention, in the above-describedaspect, the common electrode line may have low resistance compared tothe electrically-conductive members that form the first electrodes.

In a third aspect of the present invention, in the above-describedaspect, the common electrode line may be Al or Cu, or may be an alloy ora layered film including Al or Cu.

In a fourth aspect of the present invention, the above-described aspectmay further include: a first insulating film provided between theplurality of sensor portions and the common electrode line andinsulating the sensor portions and the common electrode line, theplurality of contact holes being formed in the first insulating film;and a plurality of contacts whose respective one ends are connected tothe first electrodes via the contact holes respectively, and whose otherends are connected to the common electrode line.

In a fifth aspect of the present invention, in the above-describedaspect, the scan lines may be formed by a wiring layer that is formed atan electromagnetic wave downstream side, via a second insulating film,of a wiring layer at which the common electrode line is formed, andcontact holes may be formed in the first insulating film at positions atthe irradiation surface sides of regions where the scan lines areformed.

In a sixth aspect of the present invention, in the above-describedaspect, the first insulating film may be an interlayer insulating filmwhose film thickness is greater than or equal to 1 μm. Further, in aseventh aspect of the present invention, in the above-described aspect,the first insulating film may be an interlayer insulating film whosedielectric constant is 2 to 4.

In an eighth aspect of the present invention, the above-described aspectmay further include a third insulating film that covers at least outerperipheries of the plurality of sensor portions, and in which aplurality of contact holes are formed, wherein one ends of a pluralityof contacts are connected to the first electrodes via the contact holesthat are formed in the first insulating film and the third insulatingfilm respectively, and other ends of the plurality of contacts areconnected to the common electrode line.

In a ninth aspect of the present invention, in the above-describedaspect, the third insulating film may be an interlayer insulating filmwhose film thickness is thicker than a film thickness of the sensorportions.

In a tenth aspect of the present invention, the above-described aspectmay further include a protective insulating film that is formed of aninorganic material and that covers the third insulating film, thecontacts, and the first electrodes. Further, in an eleventh aspect ofthe present invention, the above-described aspect may further include aprotective insulating film that is formed of an inorganic materialbetween the first insulating film and the third insulating film.

In a twelfth aspect of the present invention, in the above-describedaspect, the protective insulating film may be an SiNx or SiOx film.

In a thirteenth aspect of the present invention, in the above-describedaspect, the contacts may be formed from IZO or ITO. Further, in afourteenth aspect of the present invention, in the above-describedaspect, the contacts may be formed of a same member as the firstelectrodes.

In a fifteenth aspect of the present invention, in the above-describedaspect, the first electrodes may be electrically connected viaconnection regions to other adjacent first electrodes.

In a sixteenth aspect of the present invention, in the above-describedaspect, the connection regions may be formed fromelectrically-conductive members having transmittance with respect to theelectromagnetic waves.

In a seventeenth aspect of the present invention, in the above-describedaspect, the first electrodes may be connected to other first electrodesthat are adjacent along the signal line. Further, in an eighteenthaspect of the present invention, in the above-described aspect, thefirst electrodes may be connected to other first electrodes that areadjacent along the scan line.

Here, the electromagnetic waves mean electromagnetic waves that aremainly detected at the sensor portions. For example, in the case of anelectromagnetic wave detecting element that is used in anindirect-conversion-type radiation image detection device, the lightthat is emitted by the scintillator corresponds to the electromagneticwaves. Accordingly, the side of the semiconductor layer that faces thescintillator is the electromagnetic wave irradiation surface. On theother hand, the side opposite the scintillator is the electromagneticwave non-irradiation surface. Further, for the other wiring layers andthe like, the scintillator side thereof is called the upstream side, andthe opposite side thereof is called the downstream side.

In this way, in accordance with the present invention, the commonelectrode line, that supplies bias voltage to the first electrodes andthat is formed from a light-shielding, low-resistance wiring material,is formed at the electromagnetic wave downstream side of the sensorportions. Accordingly, an electromagnetic wave detecting element can beprovided that, although equipped with a common electrode line, canprevent a decrease in the efficiency of utilizing electromagnetic wavesat sensor portions.

BRIEF DESCRIPTION OF THE DRAWINGS

Exemplary embodiments of the present invention will be described indetail based on the following figures, wherein:

FIG. 1 is a structural drawing showing the overall structure of aradiation image detection device relating to first and second exemplaryembodiments;

FIG. 2 is a plan view showing the structure of one pixel unit of anelectromagnetic wave detecting element relating to the first exemplaryembodiment;

FIG. 3A and FIG. 3B are line cross-sectional views of theelectromagnetic wave detecting element relating to the first exemplaryembodiment;

FIG. 4 is a line cross-sectional view of the electromagnetic wavedetecting element to which a scintillator is affixed, relating to thefirst exemplary embodiment;

FIG. 5A through FIG. 5I are drawings for explaining processes offabricating the electromagnetic wave detecting element relating to thefirst exemplary embodiment;

FIG. 6 is a plan view showing the structure of one pixel unit of anelectromagnetic wave detecting element relating to the second exemplaryembodiment;

FIG. 7A and FIG. 7B are line cross-sectional views of theelectromagnetic wave detecting element relating to the second exemplaryembodiment;

FIG. 8 is a line cross-sectional view of the electromagnetic wavedetecting element to which a scintillator is affixed, relating to thesecond exemplary embodiment;

FIG. 9A through FIG. 9J are drawings for explaining processes offabricating the electromagnetic wave detecting element relating to thesecond exemplary embodiment;

FIG. 10 is a plan view showing the structure of one pixel unit of anelectromagnetic wave detecting element relating to another exemplaryembodiment;

FIG. 11 is a plan view showing the structure of one pixel unit of anelectromagnetic wave detecting element relating to yet another exemplaryembodiment;

FIG. 12 is a plan view showing the structure of one pixel unit of anelectromagnetic wave detecting element relating to still anotherexemplary embodiment;

FIG. 13 is a plan view showing the structure of one pixel unit of aconventional electromagnetic wave detecting element;

FIG. 14 is a line cross-sectional view of the conventionalelectromagnetic wave detecting element;

FIG. 15 is a plan view showing another structure of one pixel unit ofthe electromagnetic wave detecting element relating to the exemplaryembodiment;

FIG. 16A and FIG. 16B are line cross-sectional views of theelectromagnetic wave detecting element of the other structure;

FIG. 17 is a plan view showing the structure of one pixel unit of anelectromagnetic wave detecting element relating to a third exemplaryembodiment;

FIG. 18A and FIG. 18B are line cross-sectional views of theelectromagnetic wave detecting element relating to the third exemplaryembodiment;

FIG. 19A through FIG. 19I are drawings for explaining processes offabricating the electromagnetic wave detecting element relating to thethird exemplary embodiment; and

FIG. 20A and FIG. 20B are line cross-sectional views showing anotherexample of the electromagnetic wave detecting element relating to thethird exemplary embodiment.

DETAILED DESCRIPTION OF THE INVENTION

Exemplary embodiments of the present invention will be describedhereinafter with reference to the drawings. Note that, hereinafter, acase will be described in which the present invention is applied to anindirect-conversion-type radiation image detection device 100.

First Exemplary Embodiment

The overall structure of the radiation image detection device 100relating to a first exemplary embodiment is illustrated in FIG. 1.However, a scintillator that converts radiation into light is notillustrated.

As shown in FIG. 1, the radiation image detection device 100 relating tothe present exemplary embodiment has an electromagnetic wave detectingelement 10.

The electromagnetic wave detecting element 10 has upper electrode,semiconductor layer, and lower electrode that will be described later. Alarge number of pixels that are structured to include sensor portions103 and TFT switches 4 are provided in a two-dimensional form at theelectromagnetic wave detecting element 10. The sensor portion 103receives light, that is obtained by irradiated radiation being convertedat a scintillator, and accumulates charges. The TFT switch 4 reads-outthe charges accumulated in the sensor portion 103.

Plural scan lines 101 for turning the TFT switches 4 on and off, andplural signal lines 3 for reading-out the charges accumulated in thesensor portions 103, are provided at the electromagnetic wave detectingelement 10 so as to intersect one another.

Due to any of the TFT switches 4 that are connected to the signal line 3being turned on, an electric signal corresponding to the charge amountaccumulated in the sensor portion 103 flows to the signal line 3. Signaldetecting circuits 105, that detect the electric signals that flow-outto the signal lines 3, are connected to the respective signal lines 3.Further, a scan signal controlling device 104, that outputs controlsignals for turning the TFT switches 4 on and off to the scan lines 101,is connected to the respective scan lines 101.

The signal detecting circuits 105 incorporate therein, for each of thesignal lines 3, an amplifying circuit that amplifies the inputtedelectric signal. At the signal detecting circuits 105, the electricsignals that are inputted from the respective signal lines 3 areamplified by the amplifying circuits and detected. The signal detectingcircuits 105 thereby detect the charge amounts accumulated in therespective sensor portions 103 as information of the respective pixelsstructuring the image.

The signal detecting circuits 105 and the scan signal controlling device104 carry out predetermined processings on the electric signals detectedat the signal detecting circuits 105. Further, a signal processingdevice 106 is connected to the signal detecting circuits 105 and thescan signal controlling device 104. The signal processing device 106outputs control signals expressing signal detecting timings to thesignal detecting circuits 105, and outputs control signals expressingscan signal outputting timings to the scan signal controlling device104.

Next, the electromagnetic wave detecting element 10 relating to thepresent exemplary embodiment will be described in further detail withreference to FIG. 2 and FIG. 3. Note that a plan view showing thestructure of one pixel unit of the electromagnetic wave detectingelement 10 relating to the present exemplary embodiment is shown in FIG.2. Further, a cross-sectional view along line A-A of FIG. 2 is shown inFIG. 3A, and a cross-sectional view along line B-B of FIG. 2 is shown inFIG. 3B.

As shown in FIG. 3A and FIG. 3B, at the electromagnetic wave detectingelement 10, the scan line 101 and gate electrode 2 are formed on aninsulative substrate 1 that is formed from alkaline-free glass or thelike, and the scan line 101 and the gate electrode 2 are connected (seeFIG. 2). The wiring layer at which the scan lines 101 and the gateelectrodes 2 are formed (hereinafter, this wiring layer is also called a“first signal wiring layer”) is formed by using Al or Cu, or a layeredfilm formed mainly of Al or Cu. However, the formation of the wiringlayer is not limited to these.

An insulating film 15 is formed on the entire surface on the scan line101 and the gate electrode 2, so as to cover the scan line 101 and thegate electrode 2. The region of the insulating film 15 that ispositioned above the gate electrode 2 works as a gate insulating film atthe TFT switch 4. The insulating film 15 is formed of, for example, SiNxor the like. The insulating film 15 is formed by, for example, CVD(Chemical Vapor Deposition).

Semiconductor active layer 8 is formed as islands on the gate electrode2 on the insulating film 15. The semiconductor active layer 8 is thechannel portion of the TFT switch 4. The semiconductor active layer 8 isformed from, for example, an amorphous silicon film.

A source electrode 9 and a drain electrode 13 are formed at the upperlayer thereof. Together with the source electrodes 9 and the drainelectrode 13, the signal line 3, and common electrode line 25 that areparallel to the signal line 3, are formed at the wiring layer at whichthe source electrode 9 and the drain electrode 13 are formed. The sourceelectrode 9 is connected to the signal line 3. The wiring layer in whichthe signal lines 3, the source electrodes 9 and the common electrodelines 25 are formed (hereinafter, this wiring layer is also called a“second signal wiring layer”) is formed by using Al or Cu, or a layeredfilm formed mainly of Al or Cu. However, the formation of the wiringlayer is not limited to these.

A contact layer (not shown) is formed between, on the one hand, thesource electrode 9 and the drain electrode 13, and, on the other hand,the semiconductor active layer 8. This contact layer is formed from animpurity-added semiconductor such as an impurity-added amorphous siliconor the like. The TFT switch 4 for switching is structured as describedabove.

A TFT protecting film layer 11 is formed on substantially the entiresurface of the region on the substrate 1 where the pixels are provided(substantially the entire region), so as to cover the semiconductoractive layer 8, the source electrodes 9, the drain electrodes 13, thesignal lines 3 and the common electrode lines 25. The TFT protectingfilm layer 11 is formed of, for example, SiN_(X) or the like. The TFTprotecting film layer 11 is formed by, for example, CVD.

A coating-type interlayer insulating film 12 is formed on the TFTprotecting film layer 11. The interlayer insulating film 12 is formed toa film thickness of 1 to 4 μm from a photosensitive organic material(e.g., a positive photosensitive acrylic resin: a material in which anaphthoquinonediazide positive photosensitive agent is mixed togetherwith a base polymer formed from a copolymer of methacrylic acid andglycidyl methacrylate, or the like) having a low permittivity(dielectric constant Σ_(r)=2 to 4). In the electromagnetic wavedetecting element 10 relating to present exemplary embodiment, thecapacity between the metals that are disposed at the upper layer and thelower layer of the interlayer insulating film 12 is kept low by theinterlayer insulating film 12. Further, generally, such a material alsofunctions as a flattening film, and also has the effect of flatteningthe steps of the lower layer. Because the shapes of semiconductor layer6 that are disposed at the upper layer are flattened thereby, a decreasein the absorption efficiency due to unevenness of the semiconductorlayer 6, and an increase in leak current can be suppressed. Contactholes 16 and contact holes 22A are formed respectively in the interlayerinsulating film 12 and the TFT protecting film layer 11 at positionsopposing the drain electrodes 13 and at positions that are at theirradiation surface sides of the regions where the scan lines 101 areformed.

A lower electrode 14 of the sensor portion 103 is formed on theinterlayer insulating film 12, so as to cover the pixel region whilefilling-in the contact hole 16. The drain electrode 13 of the TFT switch4 is connected to the lower electrode 14. If the semiconductor layer 6that will be described later is formed to be thick and around 1 μm, thematerial of the lower electrode 14 is not limited provided that it iselectrically-conductive. Therefore, the lower electrode 14 can be formedby using an electrically-conductive metal such as an Al-type material,ITO (indium tin oxide), or the like.

On the other hand, if the film thickness of the semiconductor layer 6 isthin (around 0.2 to 0.5 μm), the absorption of light at thesemiconductor layer 6 is insufficient. Therefore, in order to prevent anincrease in leak current due to the illumination of light onto the TFTswitch 4, it is preferable to make the semiconductor layer 6 be an alloyor a layered film that is formed mainly of a light-shielding metal.

The semiconductor layer 6 that functions as a photodiode is formed onthe lower electrode 14. In the present exemplary embodiment, a PINstructure photodiode is employed as the semiconductor layer 6. Thephotodiode is formed by layering an n⁺ layer, an i layer, and a p⁺ layerin that order from the lower layer. Note that, in the present exemplaryembodiment, the lower electrode 14 is made to be larger than thesemiconductor layer 6. Further, if the film thickness of thesemiconductor layer 6 is thin (e.g., less than or equal to 0.5 μm), inorder to prevent incidence of light onto the TFT switch 4, it ispreferable to place a light-shielding metal to cover the TFT switch 4.

Further, in order to suppress the advancing of light into the TFT switch4 due to irregular reflection of light at the device interior, theinterval from the channel portion of the TFT switch 4 to the end portionof the lower electrode 14 that is formed from a light-shielding metal isensured to be greater than or equal to 5 μm.

A protective insulating film 17 is formed on the interlayer insulatingfilm 12 and the semiconductor layer 6, so as to have openings at therespective semiconductor layer 6 portions. An upper electrode 7 isformed on the semiconductor layer 6 and the protective insulating film17, at least so as to cover the opening portion of the protectiveinsulating film 17. A material having high light transmittance, such as,for example, ITO or IZO (indium zinc oxide) or the like, is used as theupper electrodes 7. The upper electrodes 7 is also used as anelectrically-conductive member that is connected to the common electrodelines 25 disposed at the lower layer for supplying bias voltage to theupper electrodes 7. As shown in FIG. 3B, the common electrode line 25are connected to a contact pad 24 that is formed in the layer of thelower electrode 14 via the contact hole 22A provided in the firstinterlayer insulating film 12. Further, the upper electrode 7 and thecommon electrode line 25 are electrically connected by a contact hole22B, that is provided in the protective insulating film 17, beingcovered by the upper electrode 7.

Here, the electrically-conductive member that connects the upperelectrodes 7 and the common electrode lines 25 may be formed by a metalof another layer. For example, in another structural example of theelectromagnetic wave detecting element 10 that is shown in FIG. 15 andFIG. 16, the upper electrode 7 and the semiconductor layer 6 are formedintegrally in order to decrease the contact resistance between thesemiconductor layer 6 and the upper electrode 7. Therefore, as shown inFIG. 16A and FIG. 16B, the upper electrode 7 and the semiconductor layer6 are the same shape. Further, an electrically-conductive member 26,that is connected to the common electrode line 25, is disposed on theopening portion of the protective insulating film 17 at a layer that isseparate from the upper electrode 7. In the same way as the upperelectrodes 7, a material having high light transmittance, such as, forexample, ITO or IZO (indium zinc oxide) or the like, is used as thiselectrically-conductive member 26.

As shown in FIG. 4, a scintillator 30 formed of GOS or the like isaffixed to the electromagnetic wave detecting element 10 that is formedin this way, by using an adhesive resin 28 having low light absorbance,or the like.

Next, an example of the processes of fabricating the electromagneticwave detecting element 10 relating to the first exemplary embodimentwill be described with reference to FIG. 5A through FIG. 5I.

First, the gate electrodes 2 and the scan lines 101 are formed on thesubstrate 1 as the first signal wiring layer (FIG. 5A). This firstsignal wiring layer is formed from a low-resistance metal such as Al, anAl alloy or the like, or from a layered film that is layered with abarrier metal layer formed from a high melting point metal. The firstsignal wiring layer is deposited on the substrate 1 by sputtering to afilm thickness of around 100 to 300 nm. Thereafter, patterning of aresist film is carried out by a photolithographic technique. Thereafter,the metal film is patterned by wet etching using an etchant for Al or bydry etching. By removing the resist thereafter, the first signal wiringlayer is completed.

Next, the insulating film 15, the semiconductor active layer 8, and thecontact layer (not shown) are successively deposited on the first signalwiring layer (FIG. 5B). The insulating film 15 is formed from SiNx, andthe film thickness thereof is 200 to 600 nm. The semiconductor activelayer 8 is formed from amorphous silicon, and the film thickness thereofis around 20 to 200 nm. Further, the contact layers are formed from animpurity-added amorphous silicon, and the film thickness thereof isaround 10 to 100 nm. These layers are deposited by P-CVD(Plasma-Chemical Vapor Deposition). Thereafter, in the same way as thefirst signal wiring layer, patterning of the resist is carried out by aphotolithographic technique. Thereafter, the semiconductor activeregions are formed by selectively dry etching, with respect to theinsulating film 15, the semiconductor active layer 8 and the contactlayer that are formed by an impurity-added semiconductor.

Next, the signal lines 3, the source electrodes 9, the drain electrodes13, and the common electrode lines 25 are formed as the second signalwiring layer at the top layer of the insulating film 15 and thesemiconductor active layer 8 (FIG. 5C). In the same way as the firstsignal wiring layer, the second signal wiring layer is formed from alow-resistance metal such as Al, an Al alloy or the like, or from alayered film that is layered with a barrier metal layer formed from ahigh melting point metal, or from a single layer of a high melting pointmetal film such as Mo or the like, and the film thickness thereof isaround 100 to 300 nm. In the same way as the first signal wiring layer,patterning is carried out by a photolithographic technique, and themetal film is patterned by wet etching using an etchant for Al or by dryetching. By selectively employing the etching method at this time, theinsulating film 15 is not removed. In dry etching, portions of thecontact layers and the semiconductor active layer 8 are removed andchannel regions are formed.

Next, the TFT protecting film layer 11 and the interlayer insulatingfilm 12 are successively formed at the upper layer of the layers thatwere formed as described above (FIG. 5D). There are cases in which theTFT protecting film layer 11 and the interlayer insulating film 12 are asingle body of an inorganic material, and cases in which they are formedby layering a protective insulating film formed of an inorganic materialand an interlayer insulating film formed of an organic material, andcases in which they are formed by a single layer of an interlayerinsulating film that is organic. In the present exemplary embodiment,there is a layered structure of the interlayer insulating film 12 thatis photosensitive and the TFT protecting film layer 11 that is formed ofan inorganic material, in order to stabilize the characteristics of theTFT switches 4 and suppress the electrostatic capacity between the lowerelectrodes 14 and the common electrode lines 25 at the lower layer.Accordingly, for example, the TFT protecting film layer 11 is formed byCVD, the interlayer insulating film 12 material that is photosensitiveand is a coating material is coated, and after pre-baking, the steps ofexposure and developing are carried out, and thereafter, baking iscarried out such that the respective layers are formed.

Next, the TFT protecting film layer 11 is patterned by aphotolithographic technique (FIG. 5E). Note that this step is notnecessary in cases in which the TFT protecting film layer 11 is notprovided.

Next, an Al-type material or a metal material such as ITO or the like isdeposited by sputtering to a film thickness of around 20 to 200 nm onthe top layer of the above-described layers. Then, patterning is carriedout by a photolithographic technique, and patterning is carried out bywet etching using an etchant for metal or the like or by dry etching, soas to form the lower electrodes 14 (FIG. 5F).

Next, by using CVD, respective layers of n⁺, i, p⁺ are deposited inorder from the lower layer, so as to form the semiconductor layer 6 (seeFIG. 5G). The film thickness of the n⁺ layer is 50 to 500 nm, the filmthickness of the i layer is 0.2 to 2 μm, and the film thickness of thep⁺ layer is 50 to 500 nm. The respective layers are layered in order andthe semiconductor layer 6 are patterned by a photolithographictechnique, and by selectively etching the interlayer insulating film 12at the lower layer by dry etching or by wet etching, the semiconductorlayer 6 are completed.

Here, the semiconductor layer 6 is formed by layering n⁺, i, p⁺ inorder. However, the semiconductor layer 6 may be a PIN diode by layeringp⁺, i, n⁺ in order.

Next, the protective insulating film 17 that is formed from an SiNx filmis deposited by CVD or the like so as to cover the semiconductor layer6. The film thickness of the protective insulating film 17 is around 100to 300 nm. Patterning is carried out by a photolithographic technique,and patterning is carried out by dry etching, and opening portions areformed (FIG. 5H). Here, SiNx is used as an example of the CVD film.However, the protective insulating film 17 is not limited to SiNx, andanother material may be applied provided that it is an insulatingmaterial.

Next, the connection regions of the upper electrodes 7 and the commonelectrode lines 25 are formed (FIG. 5I). The connection regions of theupper electrodes 7 and the common electrode lines 25 are formed bydepositing, by sputtering, a transparent electrode material such as ITOor the like on the top layer of the layers that were formed as describedabove. The film thickness of the connection regions is around 20 to 200nm. The connection regions are formed by carrying out patterning by aphotolithographic technique, and by patterning the upper electrodes 7 bywet etching using an etchant for ITO or the like or by dry etching. Byemploying etching selectively at this time, the protective insulatingfilm 17 at the lower layer is not damaged.

Finally, by affixing the scintillator 30 formed of GOS by using theadhesive resin 28 or the like, the electromagnetic wave detectingelement 10 is formed as shown in FIG. 4.

Principles of the operation of the radiation image detection device 100of the above-described structure will be described next.

When X-rays are irradiated from above in FIG. 4, the irradiated X-raysare absorbed by the scintillator 30 and are converted into visiblelight. The X-rays may be irradiated from below in FIG. 4. In this caseas well, the X-rays are absorbed by the scintillator 30 and areconverted into visible light. The light amount generated from thescintillator 30 is 0.5 to 2 μW/cm² in conventional X-ray photography formedical diagnosis. This generated light passes through the layer of theadhesive resin 28, and is illuminated onto the semiconductor layer 6 ofthe sensor portions 103 that are arranged in the form of an array on theTFT array substrate.

At the electromagnetic wave detecting element 10, the semiconductorlayer 6 is provided so as to be separated into the respective pixelunits. A predetermined bias voltage is applied to the semiconductorlayer 6 from the upper electrode 7 via the common electrode line 25, andwhen light is illuminated, charges are generated at the interior of thesemiconductor layer 6. For example, in the case of the semiconductorlayer 6 having a PIN structure that is layered in the order of n⁺-i-p⁺(n⁺ amorphous silicon, amorphous silicon, p⁺ amorphous silicon),negative bias voltage is applied to the upper electrode 7. If the filmthickness of the i layer is around 1 μm, the bias voltage that isapplied is around −5 to −10 V When light is not illuminated, onlycurrent that is less than or equal to several to several tens of pA/mm²flows at the semiconductor layer 6. On the other hand, when light isilluminated (100 μW/cm²), the semiconductor layer 6 generates lightcurrent of around 0.3 μA/mm². The generated charges are collected by thelower electrode 14. The lower electrode 14 is connected to the drainelectrode 13 of the TFT switch 4. Further, the source electrode 9 of theTFT switch 4 is connected to the signal line 3. At the time of imagedetection, negative bias is applied to the gate electrode 2 of the TFTswitch 4 and the TFT switch 4 is maintained in an off state, and thecharges collected by the lower electrode 14 are accumulated.

At the time of reading-out the image, on signals (+10 to 20 V) aresuccessively applied to the gate electrodes 2 of the TFT switches 4 viathe scan lines 101. Due to the TFT switches 4 being successively turnedon thereby, electric signals corresponding to the charge amountsaccumulated in the lower electrodes 14 flow-out to the signal lines 3.On the basis of the electric signals that flow-out to the signal lines3, the signal detecting circuits 105 detect the charge amountsaccumulated in the respective sensor portions 103 as information of therespective pixels forming the image. The image information expressed bythe X-rays that are irradiated onto the electromagnetic wave detectingelement 10 can thereby be obtained.

At the electromagnetic wave detecting element 10 relating to the presentexemplary embodiment, the common electrode lines 25 are formed, withrespect to the sensor portions 103, at the non-illumination surface sideof the visible light from the scintillator 30 (the downstream side ofthe visible light). Further, at the electromagnetic wave detectingelement 10 relating to the present exemplary embodiment, bias voltage issupplied to the upper electrode 7 via the contact holes 22A, 22B.

Due thereto, shielding, by the common electrode lines 25, of the lightthat is converted into visible light by the scintillator 30 and isilluminated onto the semiconductor layer 6, is eliminated. Therefore, adecrease in light utilization efficiency at the sensor portions 103 canbe prevented.

Second Exemplary Embodiment

In a case in which different types of lines are formed at the samewiring layer in the electromagnetic wave detecting element 10, it iseasy for leaks to arise between the lines due to poor patterning.

Thus, a second exemplary embodiment describes a case in which the scanlines 101, the signal lines 3, and the common electrode lines 25 areformed by different wiring layers.

A plan view showing the structure of one pixel unit of theelectromagnetic wave detecting element 10 relating to the secondexemplary embodiment is shown in FIG. 6. Further, a cross-sectional viewalong line A-A of FIG. 6 is shown in FIG. 7A, and a cross-sectional viewalong line B-B of FIG. 6 is shown in FIG. 7B. Description of portions inFIG. 6 and FIG. 7, that are the same as in FIG. 2 and FIG. 3, isomitted.

As shown in FIG. 7A and FIG. 7B, at the electromagnetic wave detectingelement 10, the scan line 101 and the gate electrode 2 are formed on thesubstrate 1, and the scan line 101 and the gate electrode 2 areconnected (see FIG. 6).

The insulating film 15 is formed on the entire surface on the scan line101 and the gate electrode 2, so as to cover the scan line 101 and thegate electrode 2. The region of the insulating film 15 that ispositioned above the gate electrode 2 works as a gate insulating film atthe TFT switch 4.

The semiconductor active layer 8 is formed as islands on the gateelectrode 2 on the insulating film 15.

The common electrode line 25 are formed, parallel to the signal line 3,at the upper layer of the insulating film 15 at which the sourceelectrode 9 and the drain electrode 13 are formed at the upper layer ofthe semiconductor active layer 8.

A first TFT protecting film layer 11A is formed on the source electrode9, the drain electrode 13 and the common electrode line 25 onsubstantially the entire surface of the region on the substrate 1 wherethe pixels are provided, so as to cover the source electrode 9, thedrain electrode 13 and the common electrode line 25.

The signal line 3, contact pad 24A and contact pad 38 are formed on thefirst TFT protecting film layer 11A. The signal line 3 is connected tothe source electrode 9 via a contact hole 36 (see FIG. 6). The signalline 3 is connected to the common electrode lines 25 via the contact pad24A and the contact hole 22A. Further, the contact pad 38 is connectedto the drain electrode 13 via a contact hole 40.

A second TFT protecting film layer 11B is formed on the signal lines 3,the contact pads 24A and the contact pads 38 on substantially the entiresurface of the region on the substrate 1 where the pixels are provided,so as to cover the signal lines 3, the contact pads 24A and the contactpads 38. Further, the coating-type interlayer insulating film 12 isformed on the second TFT protecting film layer 11B.

Contact hole 22C and the contact hole 16 are formed respectively in thesecond TFT protecting film layer 11B and the interlayer insulating film12 at positions opposing the contact pads 24A and at positions where thecontact pad 38 of the illumination surface sides of the regions wherethe scan line 101 are formed are provided.

In the same way as in the first exemplary embodiment, the lowerelectrode 14, the semiconductor layer 6 and the upper electrode 7 of thesensor portion 103, and the protective insulating film 17 are formed onthe interlayer insulating film 12. The contact pad 24A is connected tothe contact pad 24B, that is formed in the layer of the lower electrode14, via the contact hole 22C provided in the first interlayer insulatingfilm 12. Further, by covering the top of the contact hole 22B providedin the protective insulating film 17 with the upper electrode 7, theupper electrode 7 and the common electrode line 25 are electricallyconnected.

Then, as shown in FIG. 8, the scintillator 30 formed of GOS or the likeis affixed to the electromagnetic wave detecting element 10 that isformed in this way, by using the adhesive resin 28 having low lightabsorbance, or the like.

Next, an example of the processes of fabricating the electromagneticwave detecting element 10 relating to the second exemplary embodimentwill be described with reference to FIG. 9A through FIG. 9J. Note thatdescription of portions in FIG. 9 that are the same as in FIG. 5 isomitted. Further, with regard to the materials, the film thicknesses andthe methods of forming the respective layers, description of portionsthat are the same as in the first exemplary embodiment is omitted.

First, the gate electrodes 2 and the scan lines 101 are formed on thesubstrate 1. Next, the insulating film 15 is formed on the entiresurface so as to cover the gate electrodes 2 and the scan lines 101.Then, the semiconductor active layer 8 and the contact layers (notshown) are formed on the insulating film 15 (FIG. 9A).

Next, the source electrodes 9 and the drain electrodes 13 are formed atthe top layer of the semiconductor active layer 8. Then, the commonelectrode lines 25 are formed on the insulating film 15 (FIG. 9B).

Next, the first TFT protecting film layer 11A is formed on substantiallythe entire surface, so as to cover the source electrodes 9, the drainelectrodes 13, and the common electrode lines 25. Subsequently, thefirst TFT protecting film layer 11A is patterned by a photolithographictechnique (FIG. 9C).

Next, the signal lines 3, the contact pads 24A and the contact pads 38are formed on the first TFT protecting film layer 11A (FIG. 9D).

Then, the second TFT protecting film layer 11B and the interlayerinsulating film 12 are successively formed on the top surface of thelayers that are formed as described above (FIG. 9E).

Next, the second TFT protecting film layer 11B is patterned by aphotolithographic technique (FIG. 9F).

Next, an Al-type material or a metal material such as ITO or the like isdeposited by sputtering on the top layer of the aforementioned layer,and the lower electrodes 14 are formed by patterning (FIG. 9G).

Then, in a structure similar to that of first exemplary embodiment, thesemiconductor layer 6 is formed on the interlayer insulating film 12(FIG. 9H). Moreover, the protective insulating film 17 is formed (FIG.9I). Then, the connection regions of the upper electrodes 7 and thecommon electrode lines 25 are formed (FIG. 9J).

In this way, at the electromagnetic wave detecting element 10 relatingto the present exemplary embodiment, the scan lines 101, the signallines 3, and the common electrode lines 25 are formed at differentwiring layers.

Due thereto, even if poor pattering arises at the time of forming thecommon electrode lines 25 and the film of the electrically-conductivematerial remains, leak defects of the scan lines 101 and the signallines 3 do not arise.

Third Exemplary Embodiment

In the first and second exemplary embodiments, the connection regions ofthe upper electrodes 7 and the common electrode lines 25 are formed onthe protective insulating film 17. However, there are cases in whichdisconnection or the like of the connection regions arises due tochanges in the steep angle of the protective insulating film 17 at thelower layer, or cracking, or the like.

Thus, the third exemplary embodiment describes a case in which aninterlayer insulating film 18 is further formed at the peripheries ofthe respective semiconductor layer 6.

A plan view showing the structure of one pixel unit of theelectromagnetic wave detecting element 10 relating to the thirdexemplary embodiment is shown in FIG. 17. Further, a cross-sectionalview along line A-A of FIG. 17 is shown in FIG. 18A, and across-sectional view along line B-B of FIG. 17 is shown in FIG. 18B.Descriptions of portions in FIG. 17 and FIG. 18, that are the same as inFIG. 2 and FIG. 3, are omitted.

As shown in FIG. 18A and FIG. 18B, at the electromagnetic wave detectingelement 10, the coating-type interlayer insulating film 18 is formed onthe interlayer insulating film 12, so as to cover the outer peripheriesof the respective semiconductor layer 6 while having openings at therespective semiconductor layer 6 portions. In the same way as theinterlayer insulating film 12, the interlayer insulating film 18 isformed of a photosensitive organic material having low permittivity, andis thicker than the semiconductor layer 6 of the sensor portions 103,and is formed to a film thickness of 1 to 4 μm.

The contact holes 22B are formed in the interlayer insulating film 18,respectively at the positions of the contact pads 24. Note that, in thepresent exemplary embodiment, the contact hole 22B is formed in aconical shape (a taper shape) at which the diameter becomes smaller inthe direction of thickness. As shown in FIG. 18B, the contact hole 22Bis formed such that an angle θ of the inner surface with respect to thecone axis is less than or equal to 60°, and is greater than the anglewith respect to the perpendicular direction of the edge of thesemiconductor layer 6.

The upper electrodes 7 are formed on the semiconductor layer 6 and theinterlayer insulating film 18, so as to cover at least the openingportion of the interlayer insulating film 18. The upper electrodes 7also serves as an electrically-conductive member that is connected tothe common electrode lines 25 that are disposed at the lower layer forsupplying bias voltage to the upper electrodes 7. The common electrodelines 25 are connected, via the contact holes 22A provided in the firstinterlayer insulating film 12, to the contact pads 24 that is formed atthe layer of the lower electrodes 14. Further, the upper electrodes 7and the common electrode lines 25 are electrically connected by coveringthe contact holes 22B, that is provided in the interlayer insulatingfilm 18, by the upper electrodes 7.

Moreover, the protective insulating film 17 is formed on substantiallythe entire surfaces of the interlayer insulating film 18 and the upperelectrodes 7.

The scintillator 30 formed of GOS or the like is affixed to theelectromagnetic wave detecting element 10 that is formed in this way, byusing the adhesive resin 28 having low light absorbance, or the like.

Next, an example of the processes of fabricating the electromagneticwave detecting element 10 relating to the third exemplary embodimentwill be described with reference to FIG. 19A through FIG. 19I. Notethat, because FIG. 19A through FIG. 19G are the same portions as FIG. 5Athrough FIG. 5G description thereof is omitted. Further, with regard tothe materials, the film thicknesses and the methods of forming therespective layers, description of portions that are the same as in thefirst exemplary embodiment is omitted.

The interlayer insulating film 18 is successively formed on theinterlayer insulating film 12 (FIG. 19H). In the same way as at the timeof forming the interlayer insulating film 12, the interlayer insulatingfilm 18 is formed by coating a material that is photosensitive and is acoating material, and after pre-baking, carrying out the steps ofexposure and developing, and thereafter, carrying out baking, andforming the contact holes 22B as well.

Then, in the same way as the structure of the first exemplaryembodiment, the connection regions of the upper electrodes 7 and thecommon electrode lines 25 are formed on the interlayer insulating film18. Thereafter, the protective insulating film 17 is formed onsubstantially the entire surface of the upper electrodes 7 (FIG. 19I).

By further providing the interlayer insulating film 18 as in the presentexemplary embodiment, the angle θ of the inner surface of the contacthole 22B can be made to be gentle as shown in FIG. 18B. Therefore, theoccurrence of disconnection or the like of the connected portions of theupper electrodes 7 and the common electrode lines 25 can be suppressed.In particular, in cases in which IZO or ITO is used as the upperelectrodes 7, it is easy for disconnection due to changes in the steepangle, cracking or the like, to arise. Therefore, utilizing a structuresuch as that of the present third exemplary embodiment is effective.

Further, if the moisture permeability is high and moisture within theair penetrates in, leak current from the semiconductor layer 6increases, and the device characteristics of the electromagnetic wavedetecting element 10 may change. By covering the interlayer insulatingfilm 18 with the protective insulating film 17 as in the present thirdexemplary embodiment, moisture within the air penetrating into theinterlayer insulating film 18 can be suppressed.

The third exemplary embodiment describes a case in which the interlayerinsulating film 18 is provided at the peripheries of the respectivesemiconductor layer 6. However, the interlayer insulating film 18 may beprovided so as to cover the top surfaces of the respective semiconductorlayer 6, and contact holes may be formed at the top surfaces of therespective semiconductor layer 6.

Further, in the above-described third exemplary embodiment, a protectiveinsulating film 19 may be formed between the interlayer insulating film12 and the interlayer insulating film 18 as shown in FIG. 20A and FIG.20B. This case can be realized by forming the interlayer insulating film19 that is formed from an inorganic material by CVD, for example, on theinterlayer insulating film 12 and the semiconductor layer 6 that areformed in the process of FIG. 19G and thereafter, carrying out theprocess of above-described FIG. 19H so as to form the interlayerinsulating film 18, and patterning the protective insulating film 19 atthe contact hole 22B portions and the portions of connection with theupper electrodes 7 by a photolithographic technique. Due thereto, at thetime of forming the contact holes 22B in the interlayer insulating film18, the residue that is generated within the contact holes 22B can beremoved at the time of patterning the protective insulating film 19.

Further, in accordance with the above-described respective exemplaryembodiments, the contact holes that connect the upper electrodes 7 andthe common electrode lines 25 (the contact holes 22A, 22B in the firstand third exemplary embodiments, and the contact holes 22A, 22B, 22C inthe second exemplary embodiment) are disposed between adjacent sensorportions 103. Therefore, a decrease in the surface area of thelight-receiving regions of the sensor portions 103 (the fill factor) canbe prevented.

Usually, the sensor portions 103 are separated at the positions of thesignal lines 3 and the scan lines 101, in order to decrease the wiringloads of the signal lines 3 and the scan lines 101. Accordingly, thecontact holes are disposed above the signal lines 3 or above the scanlines 101. However, in order to decrease image detecting noise, it ispreferable that the contact holes be disposed above the scan lines 101.

In accordance with the above-described respective exemplary embodiments,the common electrode lines 25 are formed at the non-irradiation surfaceside of the lower electrode 14, via the insulating films (the TFTprotecting film layer 11 and the interlayer insulating film 12 in thefirst and third exemplary embodiments, and the TFT protecting filmlayers 11A, 11B and the interlayer insulating film 12 in the secondexemplary embodiment). Therefore, the capacity between the lowerelectrodes 14 and the common electrode lines 25 decreases, and theswitching noise of the TFT switches 4 can be decreased. Namely, theswitching noise increases proportionately to the capacity. For example,in a case in which the insulating film is SiNx or the like, there arelimits of around 7 for the dielectric constant and around 0.5 μm for thefilm thickness. Therefore, the capacity between the lower electrode 14and the common electrode line 25 is large. Thus, by providing theinterlayer insulating film 12 (e.g., permittivity 3.5, film thickness 2μm) as in the present exemplary embodiment, the capacity becomes, forexample, ⅛. Accordingly, the capacity is small as compared with thecapacity of the sensor portion 103, and the switching noise is of anextent that can be ignored.

Further, in accordance with the above-described respective exemplaryembodiments, the common electrode lines 25 are formed parallel to thesignal lines 3. Therefore, the signal lines 3 do not intersect thecommon electrode lines 25. Accordingly, an increase in the electrostaticcapacity of the lines due to the signal lines 3 and the common electrodelines 25 intersecting can be prevented. Thus, electronic noise that isgenerated at the signal lines 3 can be reduced.

Moreover, in accordance with the above-described respective exemplaryembodiments, portions of the upper electrode 7 extend along the signalline 3, and are connected to the upper electrodes 7 of the other pixelsthat are adjacent along the signal line 3 so as to elongate the commonelectrode line 25. Due thereto, even in a case in which poor contactarises at a contact hole that connects the upper electrode 7 and thecommon electrode line 25, bias voltage can be applied to the upperelectrode 7 from the adjacent pixels. Therefore, poor operation of thesensor portion 103 can be suppressed.

Note that the above-described respective exemplary embodiments describecases in which the upper electrode 7 is connected to the upperelectrodes 7 of the other pixels that are adjacent along the signal line3. However, the present invention is not limited to the same. Forexample, as shown in FIG. 10, the upper electrode 7 may be also beconnected to the upper electrodes 7 of the other pixels that areadjacent along the scan line 101. Due thereto, the occurrence ofartifacts caused by the electrode potential distribution along the scanline 101 direction can be suppressed. Note that, it is possible for theupper electrode 7 to be connected to only the upper electrodes 7 of theother pixels that are adjacent along the scan line 101.

Further, as shown in FIG. 11, the upper electrode 7 may be made to beindependent and not connected to the upper electrodes 7 of other pixels.

The above respective exemplary embodiments describe cases in which thecommon electrode lines 25 are formed in parallel to the signal lines 3.However, the present invention is not limited thereto. For example, asshown in FIG. 12, the common electrode lines 25 may be formed parallelto the scan lines 101.

Further, the above respective exemplary embodiments describe cases inwhich the present invention is applied to the indirect-conversion-typeelectromagnetic wave detecting element 10 that once converts radiationinto light at the scintillator 30, and converts the converted light intocharges at the semiconductor layer 6 and accumulates the charges.However, the present invention is not limited thereto, and may beapplied to, for example, a direct-conversion-type electromagnetic wavedetecting element that directly converts radiation into charges at asemiconductor layer of amorphous silicon or the like, and accumulatesthe charges.

In the indirect-conversion-type electromagnetic wave detecting element10, radiation is converted into light at the scintillator 30, and thelight converted at the scintillator 30 is received, and charges areaccumulated at the sensor portions 103. Therefore, in the case of anindirect-conversion-type electromagnetic wave detecting element, theelectromagnetic waves, that express the image that is the object ofdetection of the sensor portions of the present invention, are light.Further, at the electromagnetic wave detecting element 10 relating tothe present exemplary embodiment, even in a case in which radiation isirradiated from the substrate 1 side, the radiation is converted intolight at the scintillator 30, the converted light is illuminated ontothe sensor portion 103, and charges are generated at the semiconductorlayer 6. Therefore, even in a case in which radiation is irradiated fromthe substrate 1 side, the irradiation surface side of the semiconductorlayer 6, at which the electromagnetic waves that are the object ofdetection are irradiated, is the scintillator 30 side, and thenon-irradiation surface side is the substrate 1 side.

On the other hand, in a direct-conversion-type electromagnetic wavedetecting element, radiation is converted directly into charges at asemiconductor layer. Thus, in a direct-conversion-type electromagneticwave detecting element, the electromagnetic waves, that express theimage that is the object of detection of the sensor portion of thepresent invention, are radiation. Further, in the case of adirect-conversion-type electromagnetic wave detecting element, theradiation is converted directly into charges at the semiconductor layer.Therefore, the irradiation surface side of the semiconductor layer, atwhich the electromagnetic waves are irradiated, is the side at which theradiation is irradiated, and the non-irradiation surface side is theside at which radiation is not irradiated. For example, if radiation isirradiated from the substrate side, the irradiation surface side of thesemiconductor layer, at which the electromagnetic waves are irradiated,is the substrate side, and the non-irradiation surface side is the sideof the semiconductor layer that is opposite the side where the substrateis located.

Moreover, the above respective exemplary embodiments describe cases inwhich the present invention is applied to the radiation image detectiondevice 100 that detects an image by detecting X-rays as theelectromagnetic waves that are the object of detection. However, thepresent invention is not limited thereto. The electromagnetic waves thatare the object of detection may be, for example, any of visible light,ultraviolet rays, infrared rays, and the like.

In addition, the structure (see FIG. 1) of the radiation image detectiondevice 100 described in the respective exemplary embodiments and thestructures (FIG. 2 through FIG. 12) of the electromagnetic wavedetecting elements 10 are examples, and appropriate changes can be madethereto within a scope that does not deviate from the gist of thepresent invention.

1. An electromagnetic wave detecting element comprising: a plurality ofsensor portions, each of the sensor portions having: a semiconductorlayer provided in correspondence with intersecting portions of one of aplurality of scan lines and one of a plurality of signal lines that aredisposed so as to intersect one another, the semiconductor layergenerating charges by being irradiated by electromagnetic wavesexpressing an image that is an object of detection, a first electrodeformed by an electrically-conductive member that has transmittance withrespect to the electromagnetic waves, at an irradiation surface side ofthe semiconductor layer to which the electromagnetic waves areirradiated, the first electrode applying bias voltage to thesemiconductor layer, and a second electrode formed at a non-irradiationsurface side of the semiconductor layer with respect to theelectromagnetic waves, the second electrode collecting the charges thatare generated at the semiconductor layer; and a common electrode lineformed at an electromagnetic wave downstream side of the sensorportions, and connected to each of the first electrodes via respectivecontact holes, and supplying the bias voltage; a first insulating filmprovided between the plurality of sensor portions and the commonelectrode line and insulating the plurality of sensor portions and thecommon electrode line, the respective contact holes being formed in thefirst insulating film; and a plurality of contacts whose respective oneends are connected to the first electrodes via the contact holesrespectively, and whose other ends are connected to the common electrodeline.
 2. The electromagnetic wave detecting element of claim 1, whereinthe common electrode line has low resistance compared to theelectrically-conductive members that form the first electrodes.
 3. Theelectromagnetic wave detecting element of claim 2, wherein the commonelectrode line is Al or Cu, or is an alloy or a layered film comprisingAl or Cu.
 4. The electromagnetic wave detecting element of claim 1,wherein the scan lines are formed by a wiring layer that is formed at anelectromagnetic wave downstream side, via a second insulating film, of awiring layer at which the common electrode line is formed, and contactholes are formed in the first insulating film at positions at theirradiation surface sides of regions where the scan lines are formed. 5.The electromagnetic wave detecting element of claim 1, wherein the firstinsulating film is an interlayer insulating film whose film thickness isgreater than or equal to 1 μm.
 6. The electromagnetic wave detectingelement of claim 1, wherein the first insulating film is an interlayerinsulating film whose dielectric constant is 2 to
 4. 7. Theelectromagnetic wave detecting element of claim 1, further comprising athird insulating film that covers at least outer peripheries of theplurality of sensor portions, and in which a plurality of contact holesare formed, wherein one ends of a plurality of contacts are connected tothe first electrodes via the contact holes that are formed in the firstinsulating film and the third insulating film respectively, and otherends of the plurality of contacts are connected to the common electrodeline.
 8. The electromagnetic wave detecting element of claim 7, whereinthe third insulating film is an interlayer insulating film whose filmthickness is thicker than a film thickness of the sensor portions. 9.The electromagnetic wave detecting element of claim 7, furthercomprising a protective insulating film that is formed of an inorganicmaterial and that covers the third insulating film, the contacts, andthe first electrodes.
 10. The electromagnetic wave detecting element ofclaim 7, further comprising a protective insulating film that is formedof an inorganic material between the first insulating film and the thirdinsulating film.
 11. The electromagnetic wave detecting element of claim9, wherein the protective insulating film is an SiNx or SiOx film. 12.The electromagnetic wave detecting element of claim 1, wherein thecontacts are formed from IZO or ITO.
 13. The electromagnetic wavedetecting element of claim 1, wherein the contacts are formed of a samemember as the first electrodes.
 14. An electromagnetic wave detectingelement, comprising: a plurality of sensor portions, each of the sensorportions having: a semiconductor layer provided in correspondence withintersecting portions of one of a plurality of scan lines and one of aplurality of signal lines that are disposed so as to intersect oneanother, the semiconductor layer generating charges by being irradiatedby electromagnetic waves expressing an image that is an object ofdetection, a first electrode formed by an electrically-conductive memberthat has transmittance with respect to the electromagnetic waves, at anirradiation surface side of the semiconductor layer to which theelectromagnetic waves are irradiated, the first electrode applying biasvoltage to the semiconductor layer, and a second electrode formed at anon-irradiation surface side of the semiconductor layer with respect tothe electromagnetic waves, the second electrode collecting the chargesthat are generated at the semiconductor layer; and a common electrodeline formed at an electromagnetic wave downstream side of the sensorportions, and connected to the first electrodes via respective contactholes, and supplying the bias voltage, wherein each of the firstelectrodes is electrically connected via connection regions to otheradjacent first electrodes.
 15. The electromagnetic wave detectingelement of claim 14, wherein the connection regions are formed fromelectrically-conductive members having transmittance with respect to theelectromagnetic waves.
 16. The electromagnetic wave detecting element ofclaim 14, wherein the first electrodes are connected to other firstelectrodes that are adjacent along the signal line.
 17. Theelectromagnetic wave detecting element of claim 14, wherein the firstelectrodes are connected to other first electrodes that are adjacentalong the scan line.